Description
Specifications
- Pressure Rating
- Maximum Inlet Pressure: 150 or 250 psig / 10.3 or 17.2 bar
Outlet Pressure Ranges: 0-30, 0-60, 0-100 psig / 0-2.1, 0-4.1, 0-6.9 bar
- Material
- Body: 316L VAR Stainless Steel with Electropolish
Valve Seat: Teflon® or PCTFE
Diaphragm & Stem: 316L Stainless Steel
Seal & Remaining Parts: 316 Stainless Steel
- Operating Temperature
- Teflon® Seat: -40°F to 160°F / -40°C to 71°C
PCTFE Seat: -40°F to 140°F / -40°C to 60°C
- Port Size & Type
- Inlet & Outlet Port: 1/4 MVCR, fixed, 1/2 FVCR, 1/2 MVCR, 1/2 Tube, 3/4 Tube
Gauge Ports: 1/4 HPIC, 1/4 FVCR, 1/4 MVCR, fixed, 1/4 MVCR, swivel
- Flow Capacity
- Cv = 1.8
- Weight
- 3.2 lbs / 1.5 kg
- Additional Information
- For custom modifications or a complete system solution, please contact your local sales office.
Features
- Smooth unobstructed flow path for complete purging
- Minimized particle generation because of springless and threadless construction
- Positive shut-off seal with positionable bonnet
- Excellent leak integrity is created by metal-to-metal diaphragm to body seal
- Meets SEMI F19, UHP Grade





